溅射制备的Co/V多层膜微观结构特征与铁磁共振研究

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研究了用射频磁控溅射方法制备的[Co(15nm)/V(dV)]20(05nm≤dV≤4nm)多层膜的结构和磁性.用X射线衍射、透射电子显微镜、高分辨率透射电子显微镜等手段对其结构的分析,表明它们层状周期结构良好,沿膜的生长方向具有fcCo(111)和bccV(110)织构,且是由小的柱状晶粒构成的多晶薄膜.界面一定程度的合金化,使其成为成分调制周期结构,也是它们的一个结构特征.由其铁磁共振谱计算得到较小的g因子和4πMef值,表明多层膜界面存在一定程度的合金化.对于V层厚度小于22nm的多层膜,观测到自旋波共振谱,并作了分析.计算了层间耦合常数,说明Co层之间存在较弱的层间交换耦合作用. The structure and magnetic properties of [Co (15nm) / V (dV)] 20 (05nm≤dV≤4nm) multilayers fabricated by RF magnetron sputtering were investigated. The analysis of their structures by X-ray diffraction, transmission electron microscopy and high-resolution transmission electron microscopy showed that they have well layered periodic structures with fcCo (111) and bccV (110) textures along the growth direction of the film Is a polycrystalline thin film composed of small columnar grains. A certain degree of alloying of the interface makes it a component modulation periodic structure, which is also a structural feature of them. The smaller g-factor and 4πMef values ​​were calculated from their ferromagnetic resonance spectra, indicating that there is some degree of alloying at the multi-layer interface. For multilayers with V layer thickness less than 2  2 nm, the spin wave resonance spectrum was observed and analyzed. The interlayer coupling constants are calculated, indicating that there is weak interlayer exchange coupling between Co layers.
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