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雅满横向剪切干涉仪是一种很重要的波面枪测仪器,特别是可以对白光的波面进行检测。为了弥补传统雅满横向剪切十涉仪的不足,提出了一种相移雅满横向剪切十涉仪。它是在雅满横向剪切干涉光路中插入起偏器,1/4波片和检偏器所形成,实现了剪切干涉与相移的结合,能有效地提高测量精度,可适用于白光的波面检测,结构简单且操作方便。实验中通过旋转检偏器获得了相移下涉图,其结果很好地验证了该相移雅满横向剪切十涉仪的有效性。
Masamichi transverse shearing interferometer is a very important wave surface gun measuring instrument, especially the white light wavefront can be detected. In order to make up for the shortage of the traditional Masamitsu transverse shear interferometer, a phase shift Masamitsu transverse shear interferometer was proposed. It is formed by inserting a polarizer, a quarter-wave plate and an analyzer in the transverse shear interference light path of the Masamichi, which realizes the combination of shear interference and phase shift, which can effectively improve the measurement accuracy and is suitable for white light Wave detection, the structure is simple and easy to operate. In the experiment, the phase-shifted interferogram was obtained by rotating the analyzer. The results validated the validity of the phase-shifted Masamoto transverse shear interferometer.