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用朗缪尔探针对一个新颖的双谐振腔多功能PSII系统的微波ECR等离子体进行了诊断,得出了会切场中工作气体压强和微波功率对等离子体密度和电子温度的影响,及真空室内等离子体的分布。
A novel Langmuir probe was used to diagnose the microwave ECR plasma of a novel dual-cavity multi-function PSII system. The effects of working gas pressure and microwave power on the plasma density and electron temperature in the cut field were obtained. Vacuum chamber plasma distribution.