论文部分内容阅读
本文描述一个用新的电极系统装配的具有坚固结构的高压强电离规。电极由彼此成直角安装的两块平行的电子收集极板和两块平行的离子收集极板组成，有一根灯丝通过中心轴对称地伸向下面。灯丝由涂以氧化钇的铂－１０％铑合金丝组成，这种氧化钇涂料允许电离规在活性气体（例如大气空气）中直到压强５乇的情况下进行工作。探讨电离规的特征曲线能够取得最佳工作条件。规管灵敏度为０． ０５乇－１（对空气）并在压强范围１～５ ×１０－５乇内保持不变，只要电子加速电位不大于４２ Ｖ。在评价电离规时，这种规一直被有效地用作付校准标准。当这种规在一个不带捕集阱的转动泵系统上用于测量压强时，由于灯丝的中毒和各电极上聚合物薄膜的形成而经受到困难，在射频溅射系统中，电离规在１～５ × １０－３乇范围内被介绍用作线性的和可重复的压强测量。
This article describes a rugged, high-pressure ionization gauge assembled with a new electrode system. The electrode consists of two parallel electron collecting plates mounted at right angles to each other and two parallel ion collecting plates with a filament extending symmetrically through the central axis. The filaments consist of a platinum-10% rhodium alloy wire coated with yttrium oxide that allows the ionization gauge to operate in an active gas (such as atmospheric air) up to a pressure of 5 Torr. Discussion of the ionization gauge characteristic curve can obtain the best working condition. Regulatory sensitivity is zero. 05 torr -1 (to air) and kept constant in the pressure range of 1 to 5 × 10 -5 Torr, provided that the electron acceleration potential is not more than 42 V. In the evaluation of ionization gauge, this gauge has been effectively used as a pay-standard. When this gauge was used to measure pressure on a rotary pump system without a trap, difficulties were encountered due to filament poisoning and the formation of polymer films on the electrodes. In radio frequency sputtering systems, the ionization gauge It is introduced as a linear and repeatable pressure measurement in the range of 1 to 5 x 10-3 Torr.