论文部分内容阅读
以 Ｚｒ Ｏ Ｃｌ２·８ Ｈ２ Ｏ 为原料，采用水热法和溶胶凝胶工艺制备颗粒度为几至几十纳米的 Ｚｒ Ｏ２水溶胶，再以甲氧基乙醇转换为醇溶胶，用旋转镀膜法制备了高折射率 Ｚｒ Ｏ２ 薄膜。应用原子力显微镜及台阶仪测试了膜表面微观形貌，获得了膜的红外光谱，并用椭偏仪测得薄膜厚度与折射率。研究了薄膜厚度、折射率与热处理温度的关系，并就有机粘接剂 Ｐ Ｖ Ｐ 对 Ｚｒ Ｏ２ 薄膜折射率及机械强度的影响作了初步探讨。
Zirconium oxyhydroxide with ZrO Cl2 · 8 H 2 O as raw material was prepared by hydrothermal method and sol-gel process with a particle size of several tens to several tens of nanometers. Then, it was converted to alcohol sol by methoxyethanol, Preparation of high refractive index Zr O2 film. The morphology of the surface of the film was tested by atomic force microscope and step instrument. The infrared spectrum of the film was obtained. The thickness and refractive index of the film were measured by ellipsometry. The relationship between film thickness, refractive index and heat treatment temperature was studied. The influence of organic binder P V P on the refractive index and mechanical strength of Zr O2 film was also discussed.