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卡塞格林系统是望远系统中最经典的反射式光学系统。常规的卡塞格林系统成像点在系统以外,可以直接采用干涉仪检验。而改良型卡塞格林系统成像点在两镜之间,无法用常规方法进行检验。基于系统特性,主要分为两步检测:对主镜进行精确检验;通过检验系统的弥散斑评价成像质量。在采用轮廓仪测量、阴影法检验以及Zygo干涉仪检测的基础上,通过搭建特殊结构对系统进行精确检测。同时,在检验过程中要边测量边修正面形,使得系统成像质量符合使用要求。
Cassegrain system is the most classic reflective optical system in telephoto system. Conventional Cassegrain system imaging point outside the system, you can directly use the interferometer test. The modified Cassegrain system imaging point between the two mirrors, can not be tested by conventional methods. Based on the characteristics of the system, it is mainly divided into two steps: precise examination of the primary mirror; evaluation of the imaging quality by testing the dispersive spot of the system. Based on the profilometry, shading test and Zygo interferometer detection, the system can be precisely detected by building a special structure. At the same time, in the inspection process to measure the edge while correcting the shape, making the system image quality in line with the requirements.