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介绍了恒压式气体微流量计的测量原理及其测控系统的设计方案 ,对压力测量、变容室气体温度测量、变容室体积变化率测量、恒压控制等关键技术进行了详细说明。该测控系统的应用可以使气体微流量计的测量范围和不确定度均优于设计指标。
The measurement principle of constant pressure gas micro-flowmeter and the design scheme of its measurement and control system are introduced. The key technologies of pressure measurement, temperature measurement of variable volume chamber, volumetric change rate of variable volume chamber and constant pressure control are described in detail. The application of the monitoring and control system can make the measurement range and uncertainty of the gas micro-flowmeter better than the design specifications.