论文部分内容阅读
TiO2材料作为氧传感器具有广泛的应用．本文介绍了TiO2氧传感器的工作原理和制作过程中采用的三种工艺，即陶瓷烧结体、厚膜和薄膜技术．并对如何提高氧传感器的性能进行了探讨．
TiO2 materials have a wide range of applications as oxygen sensors. This article describes the working principle of TiO2 oxygen sensor and the three processes used in the production process, namely ceramic sintered body, thick film and thin film technology. And how to improve the performance of oxygen sensor is discussed.