最近在压力测量动向中,大多数测量工作是在温度和振动等恶劣环境下进行,或者要求测量精度高达0.1％以上。随着微电子技术的迅速发展,虽然数据分析等系统提高了性能,但是将压力、流量、温度等物理量变换成电信号的传感器还尚未获得优良的性能。特别是适合上述要求的产品还很少。 以硅半导体技术为基础的扩散型压力传感器等,在价格和一般性能方面确具优点,但在恶劣环境下使用时,会发生温度漂移、腐蚀以及压力范围、液体中使用、 Most of the recent pressure measurement trends have been made in harsh environments such as temperature and vibration, or they require measurement accuracy as high as 0.1% or more. With the rapid development of microelectronic technology, although data analysis and other systems improve the performance, sensors that convert physical quantities such as pressure, flow, temperature and the like into electrical signals have not yet obtained excellent performance. Especially for the above requirements of the product is still small. Diffusion-type pressure sensors based on silicon semiconductor technology, etc., have advantages in price and general performance, but when used in harsh environments, temperature drift, corrosion and pressure range, liquid use,