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文中介绍了高频离子源中应用等离子体化学反应与非等离子体中的化学反应对于引出金属离子束的区别.通过实验事实和分析,证明在引出金属离子方面,等离子体中的化学反应比非等离子体中的化学反应效果要好;等离子体化学反应在高频离子源中及离子注入机上得到运用,效果较好,有其特点.应用等离子体化学反应并结合物理手段较方便地获得了金属离子束,特别是解决了高挥发温度金属离子束的获得问题.已引出的离子有:Re~+、W~+、Mo~+、Y~+、Nd~+、Pd~+、Au~+、Ta~+、Ti~+、Cr~+、Ce~+、Ag~+、Fe~+,Ca~+、V~+,Al~+,Be~+、Li~+、Si~+、Ga~+、In~+,Bi~+等.
In this paper, the difference between plasma chemical reaction and non-plasma chemical reaction on the extraction of metal ion beams is introduced.According to the experimental facts and analysis, it is proved that the chemical reaction in the plasma is less than that in the plasma Plasma chemical reaction is better; plasma chemical reactions in high-frequency ion source and ion implanter have been used, the effect is better, with its characteristics. Application of plasma chemical reactions combined with physical means more convenient access to the metal ions In particular, the problem of obtaining the metal ion beam with high volatilization temperature has been solved. The ions that have been extracted include: Re ~ +, W ~ +, Mo ~ +, Y ~ +, Nd ~ +, Pd ~ +, Au ~ In the present invention, Ta ~ + Ti ~ + Cr ~ + Ce ~ + Ag ~ + Fe ~ + Ca ~ + V ~ + Al ~ + Be ~ + Li ~ + Si ~ + Ga ~ +, In ~ +, Bi ~ + and the like.