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  5. 磁控溅射Cu-Cr合金薄膜与Sn-Ag-Cu焊料在时效处理时的界面反应

磁控溅射Cu-Cr合金薄膜与Sn-Ag-Cu焊料在时效处理时的界面反应

来源 :金属热处理 | 被引量 : 0次 | 上传用户：ydaf7nh9
【摘 要】
：
采用磁控溅射的方式沉积不同Cr含量的Cu-Cr合金薄膜,通过与Sn-Ag-Cu(SAC)焊料在240℃下回焊形成焊点结构,然后将试样置于180℃下进行真空时效处理.研究Cu-Cr合金作为凸点下金属化(UBM)层时与SAC形成焊点的焊接可靠性.使用配备能量色散X射线光谱仪的场发射扫描电镜和多功能推力测试仪等分析界面金属间化合物(IMC)的形貌及焊点的剪切强度.结果表明,SAC/Cu-Cr焊点结构在回焊后形成了不同于传统的SAC/Cu焊点扇贝状IMC的针状IMC.在时效处理后,Cr在晶界处的偏析形成了富铬层,
【作 者】
：
王钰鹏 吴泓均 鲍明东 杨文灏 赵国华 周兵 
【机 构】
：
宁波工程学院 材料与化学工程学院,浙江 宁波 315211;太原理工大学 新型碳材料研究院,山西 太原 030024;宁波工程学院 材料与化学工程学院,浙江 宁波 315211;宁波工程学院 材料与化
【出 处】
：
金属热处理
【发表日期】
：
2021年11期
【关键词】
：
非平衡磁控溅射 Cu-Cr合金凸点下金属化层 Sn-Ag-Cu焊料 时效处理 界面反应 
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采用磁控溅射的方式沉积不同Cr含量的Cu-Cr合金薄膜,通过与Sn-Ag-Cu(SAC)焊料在240℃下回焊形成焊点结构,然后将试样置于180℃下进行真空时效处理.研究Cu-Cr合金作为凸点下金属化(UBM)层时与SAC形成焊点的焊接可靠性.使用配备能量色散X射线光谱仪的场发射扫描电镜和多功能推力测试仪等分析界面金属间化合物(IMC)的形貌及焊点的剪切强度.结果表明,SAC/Cu-Cr焊点结构在回焊后形成了不同于传统的SAC/Cu焊点扇贝状IMC的针状IMC.在时效处理后,Cr在晶界处的偏析形成了富铬层,其作为扩散阻挡层阻碍Cu扩散到IMC中,使得Cu3 Sn和柯肯达尔空洞的生长受到抑制.剪切强度测试结果表明,回焊后SAC/Cu-Cr试样比SAC/Cu试样具有更高的剪切强度.Cr靶电流为1.5 A的Cu-Cr合金UBM层形成的焊点结构具有较小的IMC厚度,且拥有最高的焊点剪切强度.证实了Cu-Cr合金UBM层有利于提高焊接可靠性.
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