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本文描述了材料表面改性或优化的新型宽束离子束混合装置。系统含有引出离子不同能量范围的三种离子源。可用于单离子注入,离子束混合,单离子或反应离子束溅射淀积以及离子束增强淀积。它装备有大的水冷却台,可进行各种复杂的运动,以满足处理各种复杂形状的大的工件的需要。本文还对该机的两种使用实例做了介绍。
This article describes a novel wide-beam ion beam mixing device for surface modification or optimization of materials. The system contains three ion sources with different energies for the extracted ions. Can be used for single ion implantation, ion beam mixing, single ion or reactive ion beam sputtering deposition and ion beam enhanced deposition. It is equipped with a large water cooling stage, can perform a variety of complex movements to meet the needs of a variety of complex shapes of large parts. This article also made two examples of the use of the aircraft.