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提出了一种用SMIC0.18μm CMOS混合信号工艺实现的全集成CMOS微阵列生物芯片,并成功地实现了其与一种新的生物纳米系统的集成.该电路实现了19μm×19μm电极的4×4(16单元)阵列,反相电极,电流模式放大器,译码电路,以及逻辑控制电路的单片集成,并能够提供-1.6～1.6V的组装电压,8bit的电位分辨率及39.8dB的电流增益,电源电压为1.8V,而失调和噪声电流分别为5.9nA和25.3pArms.在实验中,利用该电路实现了对30nm聚乙烯醇包裹的磁性粒子的片上选择性组装,并对实验结果进行了讨论,从而验证了该电路的正确性和该集成方法的可行性.
A fully integrated CMOS microarray biochip with SMIC0.18μm CMOS mixed signal technology was proposed and successfully integrated with a new bio-nanometer system.The circuit realized 4 × 4 (16-cell) arrays, inverting electrodes, current-mode amplifiers, decode circuits, and logic control circuits and can provide assembly voltages of -1.6 to 1.6V, 8bit of bit resolution and 39.8dB of current Gain, the supply voltage of 1.8V, while the offset and noise currents were 5.9nA and 25.3pArms.In the experiment, the use of the circuit to achieve 30nm polyvinyl alcohol-coated magnetic particles on-chip selective assembly, and the experimental results The discussion verifies the correctness of the circuit and the feasibility of the integrated approach.