据1984年11月号《西门子元件》杂志报道,西门子公司最近生产了一批基于压阻效应的硅压力传感器。它可用在测量、控制与调节技术中,其测压范围可从2千帕至40兆帕。据报道,这种压力传感器适合用于在低压、中压及高压范围进行相对压力测量。 1.KPY31R～KPY35R硅压力传感器,低压范围为≤50千帕(≤500毫巴),特点是:①负荷变化冲击强度高;②线性度好,灵敏度高;③采用氮化硅钝化,可靠性高;④温度及压力滞后特别小;⑤结构紧凑。 According to November 1984 issue of “Siemens Components” magazine, Siemens recently produced a number of piezoresistive silicon pressure sensors. It can be used in measurement, control and regulation technology, and its pressure measurement range from 2 kPa to 40 MPa. It is reported that this pressure sensor is suitable for relative pressure measurement in the low pressure, medium pressure and high pressure range. 1.KPY31R ~ KPY35R silicon pressure sensor, low pressure range of ≤ 50 kPa (≤ 500 mbar), characterized by: ① load change high impact strength; ② linearity, high sensitivity; ③ silicon nitride passivated, reliable High; ④ temperature and pressure lag is particularly small; ⑤ compact structure.