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光刻术是把超小花样刻印到半导体薄片上来制作复杂电路的技术，目前这些半导体电路正促使信息爆炸。这一技术是今天经典光学设计和制造的需求量最大的应用之一。光刻技术的进展对半导体工业的显著增长也有一定的贡献。半导体集成电路对现代生活的影响怎么评估都不会过分。从计
Lithography is the technique of making subtle patterns onto semiconductor wafers to make complex circuits that are now experiencing information explosions. This technology is one of the most demanding applications for today’s classic optical design and manufacturing. The advances in lithography have also contributed to the significant growth of the semiconductor industry. The impact of semiconductor integrated circuits on modern life will not be overestimated. From the meter