一、引言 CoMnNjO非晶薄膜是一种宽温区热敏材料。它不仅可用于一般测控温元件的制作,而且对于快速响应的测温元件具有独特的优点。目前,对于这种材料的结构及各种性质有待研究,国内外尚无有报道。非晶材料是一种亚稳态结构。若要使其具有稳定的结构和电学性质,便于实际应用,须对其退火性质进行分析和研究。本文报道用X射线衍射(XRD)和扩 I. Introduction CoMnNjO amorphous film is a wide temperature thermal material. It can not only be used for the general temperature measurement and control of the production of components, but also for the rapid response temperature measurement device has a unique advantage. At present, there is no report about the structure and various properties of this material to be studied at home and abroad. Amorphous material is a metastable structure. To make it stable structure and electrical properties, easy to practical application, its annealing properties must be analyzed and studied. This article reports the use of X-ray diffraction (XRD) and expansion