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本文自主研发设计了一套基于纳秒脉冲激光的加工系统,包括了控制单元、上位机图形软件、机械结构和光路系统。利用此系统,在单晶硅表面进行了微结构图形的加工实验,得到了较好的加工效果。借助卤素灯照明的显微镜和荧光显微镜对结果进行了进一步的观察分析,发现利用荧光显微镜进行观察,加工后的区域在特定波长照明光的照射下激发出荧光,可以清楚的看到加工结构的内部信息,边缘特征。说明纳秒脉冲激光可以改变硅材料表面的光学属性,这对进一步研究激光和硅材料的相互作用打下了一定的基础。
In this paper, a self-developed processing system based on nanosecond pulsed laser, including the control unit, PC graphics software, mechanical structure and optical system. Using this system, the micro-structure graphics processing experiment was carried out on the single-crystal silicon surface, and the better processing effect was obtained. The results were further observed and analyzed by means of a halogen lamp microscope and a fluorescence microscope. It was found that the processed area was observed under a fluorescence microscope, and the processed area was excited by the illumination of a specific wavelength of illumination light to clearly see the inside of the processed structure Information, Edge Features. Nanosecond pulsed laser can change the optical properties of the surface of the silicon material, which further study the interaction of laser and silicon material laid a foundation.