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日本夏普公司已开发钇系陶瓷超导传感器「M 型传感器」,并在1 mA 的电流下可检测10~(-4) 高斯的磁场。1987年发现钇系超导体在低磁场区域会有极大的电阻变化,继而指出高灵敏度超导磁传感器的可能性。根据喷射热解法,用厚膜形成技术和划片机,把厚膜制成锯齿状。采用把电流通路制成长形的器件形状,与以前的磁传感器相比,灵敏度提高10万倍(实验室水平提高100万倍)。超导磁传感器正向实用化方向前进。今后,采用光刻的薄膜形成技术,确立把电流通路制得更长的锯齿状制作技术,并探索含有铋系超导材料,全力开发10~(-7) 以上和SQUID 同等程度的高灵敏度超导传感器。
Japan’s Sharp Corporation has developed yttrium-based ceramic superconducting sensor “M-type sensor” and can detect 10 ~ (-4) Gaussian magnetic field at a current of 1 mA. In 1987, it was found that yttrium-based superconductors have a great resistance change in the low magnetic field region, and then pointed out the possibility of high-sensitivity superconducting magnetic sensors. According to the jet pyrolysis method, the thick film is jagged with a thick film formation technique and a dicing saw. By making the current path into an elongated device shape, the sensitivity is up to 100,000 times (1 million times more lab-level) than previous magnetic sensors. Superconducting magnetic sensor forward to the practical direction. In the future, using photolithographic film formation technology, the current path to establish a longer serrated manufacturing technology, and explore containing bismuth-based superconducting materials, to develop more than 10 ~ (-7) and SQUID the same degree of high sensitivity super Guide sensor.