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1986年,Binnig等人研制出第一台原子力显微镜(AFM),这是在扫描隧道显微镜基础之上发展起来的又一种表面分析仪器。它通过探测针尖与被测物质表面原子之间微弱的相互作用力,可以实时地得到物质的表面形貌。
In 1986, Binnig et al. Developed the first atomic force microscope (AFM), another surface analysis instrument developed on the basis of scanning tunneling microscope. It detects the surface topography of the material in real time by detecting the weak interaction between the tip and the surface of the material being tested.