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介绍了Isara 400 3维超精坐标测量机标定的关键技术,包括平台标定和系统镜面台非垂直度标定。同时,提出了一种新的超精接触探针系统,给出了这种3维灵敏度探针的标定结果。
The key technologies of Isara 400 3-dimensional ultra-precision CMM calibration are introduced, including platform calibration and system mirror table non-vertical calibration. At the same time, a new hyperfine contact probe system is proposed, and the calibration result of this 3-D sensitivity probe is given.