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二、三层减反射膜理论本论文简要地叙述了已知波长的三层减反射膜的方程式。涂层稳定性公式用来说明薄膜厚度或波长稳定的解。举实例讨论了所获得的不依赖于中间层的膜。 1.引言为了减少光学元件中因残余反射而引起的能量损失,必须采用减反射膜。单层膜或双层膜能解决单一波长的减反射膜。但是,当减反射函数增加到一系列波长范围时,则应增加膜层的数量。到目前为止已研究了少数三层或四层称之为λ/2或λ/4结构的工艺实例。
Two, three antireflection film theory This paper briefly describes the known wavelength of the three antireflection film equation. The coating stability equation is used to illustrate the solution to film thickness or wavelength stability. The examples discussed discussed do not rely on the interlayer film. 1. INTRODUCTION In order to reduce the energy loss due to residual reflection in optical components, an antireflection film must be used. Single-layer or double-layer film can solve the single-wavelength antireflection film. However, when the antireflection function is increased to a range of wavelength ranges, the number of layers should be increased. So far a few three or four layers of process known as λ / 2 or λ / 4 structures have been studied.