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研究了高纯氩气、高纯氩和高纯氢的混合气及高纯氩和乙炔的混合气等气体，对铜、钛及石墨等靶材电弧特性的影响．低熔点、导电性能好的铜及钛靶电弧燃烧时，电弧电压低，电压的波动小，电弧可以在很小的电流下工作；而石墨电弧弧压较高，电压的波动很大．石墨电弧在氩气中比它在冷却性强的Ａｒ＋Ｈ２及Ａｒ＋Ｃ２Ｈ２中稳定得多．当Ｃ２Ｈ２的含量大于８４％时，我们所采用的主电源已经不能维持正常的放电过程．另根据真空阴极弧弧光放电电弧静特性与其工作电源特性曲线的关系，分析了铜靶、钛靶及石墨靶所需电源外特性曲线的形状，针对石墨电弧的不稳定性，从理论上提出了应用范围广泛的真空阴极弧离子镀电源的特性具有较高的空载电压，具有陡降的外特性曲线
The effects of high purity argon, mixed gas of high purity argon and high purity hydrogen, mixed gas of high purity argon and acetylene on the arc characteristics of targets such as copper, titanium and graphite were studied. Low melting point, good electrical conductivity of copper and titanium target when the arc combustion, the arc voltage is low, the voltage fluctuation is small, the arc can work in a very small current; and graphite arc arc voltage is high, the voltage fluctuations. Graphite arcs are much more stable in Argon than Ar + H2 and Ar + C2H2 in their strong cooling. When the content of C2H2 is more than 84%, the main power we used can no longer maintain the normal discharge process. According to the relationship between arc static characteristics of vacuum cathodic arc discharge and its working power characteristic curve, the shape of the external characteristic curve of power supply for copper target, titanium target and graphite target was analyzed. According to the instability of graphite arc, Application of a wide range of vacuum cathodic arc ion plating power supply characteristics of a higher no-load voltage, with steep drop of the external characteristics of the curve