根据金属Pd的自催化特性 ,采用改进的PCD法制备致密超薄钯膜 ,同时考察了氢分压和操作温度对钯膜氢渗透性能的影响以及氢渗透过程的操作稳定性。结果发现 ,对金属层厚度为 0 .3～ 0 .4μm的超薄Pd/TiO2 复合膜 ,773K时的氢渗透性为 6 .3× 10 -6mol·m-2 ·s-1·Pa-1,H2 /N2 的分离系数为 1140左右。氢渗透超薄钯膜的稳定时间为 80h左右 ,而且钯膜的氢渗透速率在 6 73～ 773K的热循环过程中保持稳定 According to the autocatalytic properties of Pd, a modified ultra-thin palladium membrane was prepared by modified PCD method. The effects of hydrogen partial pressure and operating temperature on hydrogen permeation of palladium membrane and the stability of hydrogen permeation process were investigated. As a result, it was found that the hydrogen permeability of the ultra-thin Pd / TiO2 composite film with the metal layer thickness of 0.3 to 0.4 μm at 673 K was 6.3 × 10 -6 mol · m -2 · s -1 · Pa -1 , H2 / N2 separation factor of about 1140. Hydrogen permeable ultra-thin palladium membrane stabilization time is about 80h, and the hydrogen permeation rate of palladium membrane in the 673 ~ 773K thermal cycling process remained stable