离子注入是一种用离子束把材料注入到元件的表面以改善其表面性能的工艺,它和电镀、电离镀膜、化学气相沉积等通常的涂层技术有很大区别。采用离子注入技术可在工具和元件的表面形成多种合金结构,且所形成的表面层能紧紧地固结在元件基体上, Ion implantation is a process of ion implantation of a material onto the surface of a component to improve its surface properties. It is very different from the usual coating techniques such as electroplating, ion plating, and chemical vapor deposition. The use of ion implantation technology can be formed on the surface of tools and components of a variety of alloy structures, and the formation of the surface layer can be tightly fixed to the element substrate,