一、前言由于空间技术、核武器导弹工业的发展以及集成电路等电子工业的迅速发展,使得半导体器件日趋复杂,对器件的精度要求日益提高,要求半导体产品质量可靠、使用寿命长久,国外在这类产品的生产中曾遇到电子产品质量不高、成品率低、返修率高等严重问题,经调查研究表明,空气中的尘埃对产品的污染是造成产品失效的主要原因,直接影响半导体产品的成品率及性能,还由于其他工业的发展,外部空气的污 I. INTRODUCTION Due to the development of space technology, the development of the nuclear weapon missile industry and the rapid development of the electronics industry such as integrated circuits, the semiconductor devices are becoming more and more complicated. The requirements on the accuracy of the devices are increasingly increasing. Semiconductor products are required to have reliable quality and long service life. Product quality has encountered in the production of electronic products is not high, the low rate of finished products, high repair rate serious problems, the investigation shows that dust in the air of the product is the main cause of product failure, a direct impact on the finished semiconductor products Rate and performance, but also due to the development of other industries, the external air pollution