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制作了基于绝缘体上硅(Silicon on Insulator,SOI)材料的8×16通道的阵列波导光栅(Arrayed Waveguide Grating,AWG)与电吸收型可调光衰减器(Variable Optical Attenuator,VOA)的单片集成器件,其信道间隔为200GHz。该集成器件采用脊形波导结构,其截面尺寸为亚微米级,整体尺寸为2.9mm×1mm。该VMUX器件的片上损耗为9.324~10.048dB,串扰为6.5~8.2dB;在20dB衰减下,单通道最大功耗为87.98mW;最大信道偏振相关损耗(Polarization Dependent Loss,PDL)为0.461dB,16通道的衰减一致性为0.245dB。该器件能够实现良好的波分复用/解复用及信道功率均衡的功能。
The monolithic integration of an 8 × 16 channel Arrayed Waveguide Grating (AWG) and a Variable Optical Attenuator (VOA) based on silicon on insulator (SOI) material has been fabricated. Device with a channel spacing of 200GHz. The integrated device uses ridge waveguide structure, the cross-sectional size of sub-micron, the overall size of 2.9mm × 1mm. The on-chip loss of the VMUX device is 9.324 ~ 10.048dB and the crosstalk is 6.5 ~ 8.2dB. The maximum single-channel power consumption is 87.98mW at 20dB attenuation. The maximum PDL is 0.461dB, The attenuation of the channel is 0.245dB. The device can achieve good wavelength division multiplexing / demultiplexing and channel power balance function.