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用一种新掩模来描划衬底上光电探测器元件的光电探测器本体及粘合层的轮廓,在本体及粘合层上的掩模的小孔限定与衬底平面构成的尖角。沿这个角度进行空气磨蚀,除去光电探测器本体及粘合层的无用部分,留下部份作金属互连所需的轮廓。
A new mask is used to characterize the outline of the photodetector body and the adhesive layer of the photodetector element on the substrate. The apertures in the mask on the body and the adhesive layer define a sharp angle to the plane of the substrate . Air abrasion is performed at this angle to remove unwanted portions of the photodetector body and adhesive layer, leaving portions of the profile required for metal interconnection.