采用压痕试验法的临界开裂 (或剥落 )载荷PCr和抗裂性参数dP/dX两指标系统 ,评定了硬质合金基体经不同预处理工艺和沉积工艺参数合成的金刚石膜的粘附性能 ,探讨了粘附性能指标与基体表面钴相含量、表面粗糙度、主要沉积工艺参数 (如甲烷浓度、沉积气压、沉积功率 )、膜中残余应力之间的内在关系。适当的基体表面预处理、合适的甲烷浓度、较低的沉积气压、较高的沉积功率、适中的残余应力均有利于改善硬质合金基体上金刚石膜的粘附性能 Using the indentation test method of critical cracking (or peeling off) load PCr and crack resistance parameter dP / dX two index system to evaluate the cemented carbide substrate by different pretreatment process and deposition process parameters of diamond film adhesion performance, The intrinsic relationship between the adhesion performance index and the cobalt phase content, surface roughness, main deposition parameters (such as methane concentration, deposition pressure, deposition power) and residual stress in the film were discussed. Appropriate matrix surface pretreatment, appropriate methane concentration, lower deposition pressure, higher deposition power, moderate residual stress are all conducive to improving the adhesion of diamond films on cemented carbide substrates