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从光刻伺服盘的制作工艺过程和光刻伺服图形道位置信息的特征入手，分析了引起光刻伺服盘安装偏心的原因以及偏心对磁头伺服定位的影响，并提出了提高安装精度和减小偏心的有效途径。
Starting from the manufacturing process of litho servo disk and the location information of litho servo pattern, the reasons of the eccentricity caused by the installation of litho servo disk and the influence of eccentricity on the servo positioning of the magnetic head are analyzed. The methods to improve the accuracy and reduce Eccentric effective way.