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用磁控溅射技术在双面抛光的蓝宝石衬底上沉积了20 nm Ti和100 nm Au的金属薄膜,通过标准光刻工艺制备出1.6和2.0μm两种周期结构的一维光栅表面等离子体共振(SPR)传感器。用时域有限差分算法(FDTD)模拟仿真并结合实验测试的透射光谱,研究分析了不同周期结构的金属薄膜光栅型SPR传感器的特性。基于金属光栅耦合,利用表面等离子体激元(SPP)的局域特性和光栅的选频特性,实现了SPR传感器的信号增强和滤波功能。研究结果表明,利用金属薄膜光栅表面介质的变化引起的光栅透射光谱中激发表面等离子体共振峰的位置变化,可以获得被测物体的物理、生物和化学等相关特征信息。
A 20 nm Ti and 100 nm Au thin film was deposited on a double-polished sapphire substrate by magnetron sputtering. One-dimensional grating surface plasmons of 1.6 and 2.0 μm periodic structures were prepared by standard photolithography Resonance (SPR) sensor. The finite-difference time-domain (FDTD) simulation and experimental transmission spectra were used to analyze the characteristics of metal grating grating SPR sensors with different periodic structures. Based on the coupling of metal grating, the signal enhancement and filtering function of SPR sensor are realized by utilizing the local characteristics of surface plasmon polariton (SPP) and the grating frequency selectivity. The results show that the physical, biological and chemical properties of the measured object can be obtained by using the change of the position of the excitation plasmonic resonance peak in the grating transmission spectrum caused by the change of the surface medium of the metal thin film grating.