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利用动态掩膜腐蚀技术 ,研究了 HF/ Cr O3腐蚀液对各种不同组分的 Alx Ga1 - x As(x =0 .3,0 .5 ,0 .6 5 )的腐蚀速率及腐蚀表面形貌 .随着 HF(48wt% ) / Cr O3(33wt% )的体积比由 0 .0 1变化到 0 .138,相应的腐蚀液对 Al0 .8-Ga0 .2 As/ Al0 .3Ga0 .7As的选择性由 179降到 8.6 ;通过调节腐蚀液的选择性 ,在 Al0 .3Ga0 .7As外延层上制备出了倾角从 0 .32°到 6 .6 1°的各种斜面 .当 HF(48wt% ) / Cr O3(33wt% )的体积比为 0 .0 2 8时 ,Al组分分别为 0 .3、0 .5和 0 .6 5时 ,相应的腐蚀表面的均方根粗糙度为 1.8、9.1和 19.3nm.另外 ,还分析了腐蚀机理与腐蚀表面形貌之间的关系
The effects of HF / Cr O3 etching solution on the corrosion rate and corrosion surface area of Alx Ga1 - x As (x = 0.3,0.5,0.55) with different compositions were studied by using dynamic mask etching technique. As the volume ratio of HF (48 wt%) / Cr O3 (33 wt%) was varied from 0.01 to 0.138, the corresponding etching solution was stable against Al0.8-Ga0.2As / Al0.3Ga0.7As The selectivity decreased from 179 to 8.6; and by adjusting the selectivity of the etchant, various bevels with tilt angles from 0 .32 ° to 6 .61 ° were prepared on the Al0.3Ga0.7As epitaxial layer. When HF (48wt% ) / Cr O3 (33 wt%) is 0. 02 8, the Al composition is respectively 0.3, 0.5 and 0.56, the root mean square roughness of the corresponding etched surface is 1.8 , 9.1 and 19.3 nm. In addition, the relationship between corrosion mechanism and surface morphology of corrosion was also analyzed