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详细介绍快速响应单晶硅空间光调制器件的结构、工作机理、制作工艺、性能参数。空间光调制器的极限分辨率为401p／mm，口径为40mm，在930mm（△λ＝40nm）写入光灵敏度为20μW／cm2，响应时间为15ms。给出该器件的应用实例。
The structure, working mechanism, manufacturing process and performance parameters of the rapid response single crystal silicon spatial light modulator are introduced in detail. The spatial light modulator has a limit resolution of 401p / mm, a caliber of 40mm, a write sensitivity of 20μW / cm2 at 930mm (Δλ = 40nm) and a response time of 15ms. Give the application example of this device.