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提出了一种静电梳齿驱动、电容检测的微机械陀螺仪,分析了其工作原理。同时,通过陀螺进行了必要的仿真和相关的分析计算,并根据加工工艺的要求,得到合理的结构。采用体硅标准工艺设计了陀螺的工艺版图,对其进行了封装分析。
A micromechanical gyro with electrostatic comb drive and capacitance detection is proposed and its working principle is analyzed. At the same time, the necessary simulation and related analysis and calculation are carried out through the gyro, and a reasonable structure is obtained according to the requirements of the processing technology. The technical process of the gyroscope is designed using the standard silicon bulk process, and the package analysis is carried out.