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贝尔实验室报导了一种新型InP腐蚀剂,它由HNO_3:HBr组成,体积比为1:3。这种腐蚀剂在(111)p面上可以得到三面对称的清晰的腐蚀坑,并且角锥形腐蚀坑在(001)面上沿一个<110>方向拉长。把这种腐蚀剂与(001)取向上的Huber腐蚀剂以及(111)取向上改
Bell Labs has reported a new type of InP etchant, consisting of HNO 3: HBr in a volume ratio of 1: 3. This etchant yields a three-plane symmetrical clear pits on the (111) p-plane, and the pyramidal pits extend in a <110> direction on the (001) plane. The etchant is altered with the (001) oriented Huber etchant and the (111) orientation