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对确定性抛光中的磁流变抛光、磁射流抛光、离子束抛光、气囊抛光技术进行综述,重点介绍各种方法的工作原理以及如何实现确定性抛光,指出确定性抛光的发展趋势。
Magneto-rheological polishing, magnetic fluid jet polishing, ion beam polishing and airbag polishing are reviewed in the definitive polishing. The principle of each method and how to achieve deterministic polishing are pointed out. The development trend of deterministic polishing is pointed out.