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用磁控溅射技术制备不同调幅波长(L)的W(Mo)/Cu纳米多层膜,所制膜系在60keV氦离子(He+)辐照条件下注入不同剂量:0,1×1017He+/cm2,5×1017He+/cm2.用X射线衍射仪(XRD)和高分辨透射电子显微镜(TEM)表征W(Mo)/Cu纳米多层膜辐照前后微观结构.研究结果表明:1)He+离子轰击引起温升效应是导致沉积态亚稳相β-W转变成稳态α-W相的主因,而与调幅波长无明确关联;2)纳米多层结构中W(Mo)和Cu膜显现出的辐照耐受性与调幅波长相关,调幅波长越小,抗He+的辐照性能越强;3)在5×1017He+/cm2注入条件下,观察到He团簇/泡在纳米结构W(Mo)和Cu膜中的积聚行为存在明显差异:在W(Mo)膜中He团簇/泡的分布与晶粒取向相关,He团簇/泡倾向于沿W(211)晶面分布;而Cu膜非晶化且He团簇/泡在其体内呈均匀分布.
The W (Mo) / Cu nano-multilayer films with different modulation wavelength (L) were prepared by magnetron sputtering. The films were implanted with different dose of 0,1 × 1017He / cm2 and 5 × 1017He / cm2.The microstructures of W (Mo) / Cu nanofilms before and after irradiation were characterized by X-ray diffraction (XRD) and high resolution transmission electron microscopy (TEM) .The results show that: 1) The temperature rise effect caused by bombardment is the main reason leading to the metastable metastable phase β-W into the steady-state α-W phase, but not to the amplitude modulation wavelength. 2) The W (Mo) and Cu films appear in the nano-multilayer structure The radiation resistance of He cluster is related to the amplitude modulation wavelength. The smaller the amplitude modulation wavelength, the stronger the radiation resistance of He +. 3) Under the condition of 5 × 10 17 He / cm 2 implantation, ) And Cu films. The distribution of He clusters / bubbles in W (Mo) films is related to grain orientation, and He clusters / bubbles tend to distribute along the W (211) plane. Cu The membrane is amorphized and He clusters / bubbles are uniformly distributed in their body.