通过ANSYS软件分析了平面电容传感器电容量与极板宽度和极板间距的关系,并选择合适的平面电容传感器探头的尺寸。针对非金属材料表面下水损伤的检测,提出了一种结构简单、操作方便的三电极平面电容传感器检测法。根据平面电容传感器检测材料相对介电常数的变化,深入研究了非金属材料表面下水柱损伤深度和水柱损伤区域大小对电容量的影响。仿真和初步实验结果表明,在一定范围内,测得的电容值随着水柱损伤深度和损伤区域大小的变化而变化。 The relationship between capacitance of planar capacitive sensor and the width of the electrode plate and the distance between the electrode plates is analyzed by ANSYS software and the size of the suitable planar capacitive sensor probe is selected. Aiming at the detection of surface water damage of non-metallic materials, a simple and easy-to-use three-electrode planar capacitive sensor detection method is proposed. According to the change of relative dielectric constant of planar capacitive sensor, the influence of the damage depth of water column on the surface of nonmetallic material and the damage area of ​​water column on the capacitance was deeply studied. Simulation and preliminary experimental results show that within a certain range, the measured capacitance changes with the depth of damaged water column and damage area size changes.