本文介绍了硅碳棒炉的特性以及对各种不同的发热体控制方式的选择,着重叙述了硅碳棒炉控温系统的选定原则及其在操作上的注意事项。也指出了系统由手动向自动切换的过程中,由于电流冲击加快硅碳棒老化的原因,并给出了实验结果。图2幅,表1个。 This paper introduces the characteristics of silicon carbide furnace and the choice of control methods of different heating bodies. It focuses on the selected principles of silicon carbide furnace temperature control system and its precautions in operation. Also pointed out that the system from manual to automatic switching process, due to the current impact of silicon carbide to accelerate the aging reasons, and gives the experimental results. Figure 2, Table 1.