强流电子束在激光腔中的能量沉积是KrF准分子激光研究的一个关键问题。由能量沉积的研究可确定泵浦效率和激光的本征效率。激光腔中任一体积中的能量沉积都等于气体的平动能与辐射能之和。由于在泵浦束的脉冲周期(≤100ns)内,没有气体的运动,气体处在常密度状态下,所以气体平动能量的增加将按照理想气体规律导致气体压 The energy deposition of intense electron beams in the laser cavity is a key issue in KrF excimer laser research. Studies of energy deposition can determine the pump efficiency and the intrinsic efficiency of the laser. The energy deposition in either volume in the laser cavity is equal to the sum of the translational and radiant energies of the gas. Since there is no motion of the gas during the pulse period of the pump beam (≤100 ns), the gas is in a state of constant density so that an increase in translational energy of the gas will result in a gas pressure