在包含上千个元件的特大激光系统出现之后,需要研究镀膜的和未镀膜的光学元件的清洗方法.在激光系统中,光学元件要能良好工作,其光学表面不应当有污膜或其他污物.污膜会产生不希望的光吸收带和光散射.而且,众所周知,在高功率激光系统中,表面沾污或陷落在膜层之间的污物,会降低零件的激光损伤阈值.因此,在光 After the advent of extra-large laser systems containing thousands of components, there is a need to study methods of cleaning coated and uncoated optical components in which the optical components are to function well and whose optical surfaces should not be contaminated or otherwise contaminated The fouling film produces undesirable light absorption bands and light scattering, and it is also known that in high-power laser systems contaminants that stain or sink on the surface of the film reduce the laser damage threshold of the part, In the light