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本文在总结国内外粗线纹光栅绝对零位实现方法的基础上,提出了一种新型绝对零位粗光栅的方案。它克服了传统粗光栅采用微动开关作为附加零位标志的缺点,将零位标志直接刻制在粗光栅尺上,采用编码识别的方法,用专用自扫描光电二极管列阵CG200S提取粗定位信号,结合列阵自扫描起始信号S及其调相测量信号MS的边沿触发脉冲,产生高精度绝对零位脉冲。既保证了系统精度,又解决了粗光栅与绝对零位一体化的问题。为进一步研制新型绝对零位粗光栅位移测量系统提供了理论依据和实现途径.
Based on the summary of the method of realizing the absolute zero position of the thick raster at home and abroad, a new scheme of the absolute zero rough raster is proposed. The utility model overcomes the defect that the traditional coarse grating adopts the microswitch as an additional zero mark, the zero mark is directly engraved on the coarse grating scale, adopts the method of code recognition, and uses the special self-scanning photodiode array CG200S to extract the coarse positioning signal , In combination with the array self-scanning start signal S and its phase-modulated measurement signal MS edge trigger pulse to generate high-precision absolute zero pulse. Not only ensure the system accuracy, but also solve the problem of integration of coarse grating and absolute zero. It provides a theoretical basis and avenues for further development of a new absolute zero coarse grating displacement measurement system.