一项能够为半导体制造商每年节省数十亿美元的测量性能上的基础性突破为其发明者——美国国家标准与技术研究院(NIST)研究人员在2013年赢得R&D 100大奖。这项由NIST研究人员开发的被称作定量混合测量法的技术(Quantitative Hybrid Metrology,QHM),利用统计技术以及由两种或两种以上仪器测量所获得的测量值,来严格确定半导体芯片上纳米 An inventor who invented a fundamental breakthrough that can save billions of dollars in measured performance per year for semiconductor manufacturers - the National Institute of Standards and Technology (NIST) researchers won the R & D 100 in 2013. The technology, called Quantitative Hybrid Metrology (QHM), developed by NIST researchers, uses statistical techniques and measurements from measurements by two or more instruments to rigorously define a semiconductor chip Nano