论文部分内容阅读
本文报道了一种SM材料的制备、性能、钝化保护机理和试用结果．该材料具有优良的电性能、钝化保护性能、机械性能和化学稳定性，并经晶闸管生产线工艺论证及应用，能明显地减小漏电流，提高耐压水平和增加产品合格率．该项成果为高压电力半导体器件研究和生产提供了一种高性能的钝化保护材料，具有先进性和实用性．
This paper reports the preparation, properties, passivation protection mechanism and experimental results of a SM material. The material has excellent electrical properties, passivation protection performance, mechanical properties and chemical stability, and by thyristor production line process demonstration and application, can significantly reduce the leakage current, increase the level of pressure and increase product yield. This achievement provides a high-performance passivation protection material for the research and production of high-voltage power semiconductor devices, which is advanced and practical.