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为了改善 Pt Si IRCCD器件的红外响应特性 ,需要添加长焦距微透镜阵列进行焦平面集光 ,本文提出了一种新的方法—曲率补偿法用于长焦距微透镜阵列的制作 .扫描电子显微镜 (SEM)显示微透镜阵列为表面极为平缓的方底拱形阵列 ,表面探针测试结果显示用曲率补偿法制作的微透镜阵列表面光滑 ,单元重复性好 ,其焦距可达到 685.51 μm.微透镜阵列器件与 Pt Si IRCCD器件在红外显微镜下对准胶合 ,显著改善了 IRCCD器件的光响应特性 .
In order to improve the IR response characteristics of Pt Si IRCCD devices, a long focal length microlens array needs to be added to collect the focal plane light, a new method is presented in this paper - the curvature compensation method is used to fabricate a long focal length microlens array. Scanning electron microscopy SEM) shows that the microlens array is a square arched array with a very gentle surface. The surface probe test results show that the microlens array fabricated by the curvature compensation method has a smooth surface with good cell repeatability and a focal length of 685.51 μm. The device is aligned with the Pt Si IRCCD device under an infrared microscope, significantly improving the photoresponse characteristics of the IRCCD device.