一、非接触高精度测量的进展图1表示包括处在研究阶段的技术在内,能达到的测量精度与年代的关系。虽然象尺寸这类绝对值的精度和表面粗度这类相对值的精度相互混杂,尚不能统一,但是可以看出,从六十年代开始,高精度测量技术已经有了迅速 First, the progress of non-contact high-precision measurement Figure 1 shows that including the technology in the research phase, including the relationship between measurement accuracy and time. Although the accuracy of such absolute values ​​as the size and the relative accuracy of the surface roughness are mixed with each other and can not be unified yet, it can be seen that, since the 1960s, high-precision measurement techniques have been rapidly developed