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在本文中作者描述了工作在300～700兆赫的透射式扫描声学显微镜的研究试制工作.介绍了显微镜的设计和结构,所用声学聚焦系统、换能器及显微镜的机械微波和电路部分.理论分析和实验结果表明该声学显微镜的分辨率不劣于2微米,达到了衍射极限.最后给出了使用该显微镜所获得的一些样品的图像.
In this paper, the authors describe the experimental work of a transmission scanning acoustic microscope operating at 300 to 700 MHz, introducing the design and construction of the microscope, the acoustic focusing system used, the mechanical microwave and circuit components of the transducer and the microscope. The experimental results show that the resolution of the acoustic microscope is not inferior to 2 μm and the diffraction limit is reached.Finally, the images of some samples obtained with this microscope are given.