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采用铝(Al)盐溶液作为诱导源进行了非晶硅晶化成多晶硅的研究.光学显微镜观测与Raman光谱分析表明,合适配比的铝盐溶液能够将非晶硅予以诱导晶化.采用剥层XPS测试分析,探究了Al盐溶液与硅表面可能的化学反应以及随之发生的硅-铝层交换的过程.最后对溶液法诱导晶化的机理进行了讨论.
The crystallization of amorphous silicon into polycrystalline silicon was investigated by using Al salt solution as inducing source.The optical microscope observation and Raman spectroscopy analysis showed that the suitable proportion of aluminum salt solution could induce amorphous silicon crystallization.Using the peeled layer XPS test analysis to explore the possible chemical reaction between Al salt solution and silicon surface and the consequent silicon-aluminum exchange process.Finally, the mechanism of solution-induced crystallization was discussed.