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本文报导用溅射ZnO膜作为衬垫的“插入衬垫式抬离法”(SILO spacer-inserted lift-off method),它在制作声表面波换能器铝电极的微型制作技术中的用途已被确证。这种方法以H_3PO_4溶液对ZnO膜的腐蚀速率比对铝膜大得多这一事实为根据。ZnO膜腐蚀速率的精确测量用氦-氖激光的多光束反射法进行。这种方法能制作线宽约0.8微米而无任何损伤的铝电极,这种电极宽度约相当于基波1千兆赫。
This paper reports a SILO spacer-inserted lift-off method using a sputtered ZnO film as a spacer, which is used in miniature fabrication techniques for making aluminum electrodes for surface acoustic wave transducers Use has been confirmed. This method is based on the fact that the H_3PO_4 solution has a much higher corrosion rate on the ZnO film than on the aluminum film. The precise measurement of the corrosion rate of the ZnO film is carried out by the multi-beam reflection method of a helium-neon laser. This method produces an aluminum electrode with a line width of about 0.8 micrometers without any damage, which is approximately 1 GHz wide.