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对各国进行的软X射线多层膜研究所取得的最新成果给出了比较系统全面的评述。首次给出了文献报道的软x射线全波段的各种膜系实测正入射反射率的统计结果。
The latest achievements made in soft X-ray multilayer film research in various countries give a systematic and comprehensive review. For the first time, the statistical results of the measured normal incident reflectivity of all kinds of films in soft x-ray range reported in the literature are given for the first time.