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本文讨论了减少或消除测量过程中调焦误差的两种方法。一种方法是采用“测微准直系统”,即用一个准直系统瞄准,用一个无焦系统作反射器。另一种方法是采用“等精度测量系统”。这里也使用了无焦系统,使远、近测试点有相同的倍率,孔经角(以及相同的瞄准精度和象面照度)。前者正在研制过程中,设计精度为2μ/m。后者已经制成仪器,经签定及与国内外相类似的仪器比较,证明其精度为1.5μ/m。这些成果均较内调焦式系统的精度高半个至一个数量级。
This article discusses two ways to reduce or eliminate focus error during measurement. One way is to use a “micrometric alignment system,” aiming a collimation system and using a nonfocal system as a reflector. Another method is to use “equal accuracy measurement system.” Also used here, the cokeless system, far and near test points have the same magnification, hole angle (and the same aiming accuracy and the image plane illumination). The former is being developed, the design accuracy of 2μ / m. The latter has been made into an instrument, which has been signed and compared with similar instruments both at home and abroad to prove its accuracy of 1.5μ / m. These results are more than half to one order of magnitude more accurate than the in-focus system.